【摘要】 研究了用微波ECR等离子体反应溅射制备透明导电氧化锌薄膜工艺中靶压及铝的掺入对薄膜电阻率和透光率的影响 ,制得电阻率为 1 0 -5Ω·m数量级 ,可见光平均透光率大于 80 %的透明导电ZnO∶Al (AZO)膜。更多还原

【Abstract】 The influence of sputtering voltage and Al dopping on the electrical and optical characteristics of ZnO thin film prepared by electron cyclotron resonance (ECR) plasma sputtering method was studied. By controlling the sputtering voltage and dopping Al, the ZnO∶Al film was obtained, the resistivity of the ZnO∶Al film 10 -5 Ω·m and its average transmittance in the visible region is above 80%.更多还原