【摘要】 用电子束蒸发方法在抛光玻璃衬底上分别制备了X射线激光用的稀土元素Nd ,Dy ,Er和Yb薄膜靶。用石英晶片作为陪片 ,通过测量晶振频率的方法研究了薄膜靶在真空、干燥空气及潮湿空气等不同环境中不同阶段的氧化层增长过程。发现除Yb薄膜在淀积结束后的干燥空气和潮湿空气环境中的氧化过程遵循倒对数规律之外 ,其它所有的氧化过程均可用对数规律很好地进行拟合。淀积结束后充入大气时 ,薄膜表面的快速氧化过程仅为数分钟。在相同的环境中 ,Nd氧化速率最高 ,Er和Dy其次 ,Yb最低 ;在不同的环境中 ,Nd受环境湿度的影响最大 ,Er和Dy其次 ,Yb最低。更多还原

【Abstract】 Thin rare earth Nd,Dy,Er and Yb metal films,used as targets to generate X ray laser,were grown on quartz electrodes.The surface oxidation of these films were studied by measuring variations in oscillation frequency of the quartz crystal electrodes.The results show that logarithmic fitting works well in describing the surface oxidation of Nd,Dy and Er targets under different conditions,for different periods of time,whereas inverse logarithmic fitting best describes the Yb oxidation after exposing to dry and /or humid air.On exposing to air,rapid surface oxidation lasts several minutes.Moisture significantly speeds up the surface oxidation;the higher the relative humidity,the faster the oxidation rate.Nd,Er,Dy and Yb can be lined up in a descending order of oxidation rate under the same oxidation conditions.更多还原