【摘要】 提出了环形波导场分布的计算模型 ,计算了环形波导内的微波场分布。结果表明即使在环形腔直径大于微波波长时 ,微波能量也能传到真空室中心附近 ,这为实现大面积均匀等离子体提供了理论依据更多还原

【Abstract】 A slot antenna model which involves the calculation of microwavefield distribution in annular waveguide is presented.The microwave field distribution has been calculated.The results show that the mircrowave power is supplied near the centre of the vacuum chamber even if the diameter of the annular waveguide is lager than the waveguide wavelength.The theoretical evidence shows thatit is possible to produce large area uniform plasma using this plamsa source.更多还原