【摘要】 采用有限积分法(FIT算法) ,并利用一种简单的等离子体模型模拟了具有轴对称的微波等离子体反应腔中微波场与等离子体的行为。计算出了给定等离子体的空间分布时电场的分布情况 ,以及给定电场的空间分布时等离子体的分布情况 ,从而得到微波———等离子体反应腔中电磁场稳定分布以及等离子体的放电位置。并依据实验中的一些可变参数 ,寻求影响等离子体放电位置的参数 ,为设计化学气相沉淀(CVD)技术沉积大面积金刚石膜微波反应腔提供依据更多还原

【Abstract】 Based on the Finite Integration Theory(FIT), a simple model has been developed to simulate the electromagnetic field and plasma densities in a rotational symmetric microwave-reactor.The computer programs calculate alternately the electric field for a given spatial distribution of the plasma and the plasma for a given distribution of the electric field.A self consistent solution of electromagnetic field in the microwave field plasma system and the location of discharge of plasma have been obtained.Considering some adjusted parameters in the experiments,the parameters which effect the location of discharge of plasma have been discussed. So the design of the microwave plasma reactor for large area diamond CVD can be predicated.更多还原