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石英器件加工工艺及最新进展

Machining Technologies for Quartz Devices and Its New Development

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【作者】 周岩刘晓胜杨乐民郑胜军张广玉

【Author】 ZHOU Yan(Harbin Institute of Technology,Harbin,China)LIU Xiaosheng YANG Lemin ZHENG Shengjun ZHANG Guangyu

【机构】 哈尔滨工业大学机电学院东南大学无线电系

【摘要】 介绍国内外石英器件加工工艺发展 ,以石英摆片为例 ,介绍石英器件常用的加工工艺以及石英器件加工工艺的最新工艺进展

【Abstract】 Quartz crystal has many good and special physical and chemical characteristics,and is as a common material for sensors. Quartz device is very difficult to manufacture by traditional machining technologies because of its rigidity and crispness. After introducing the development of processing quartz crystal at home and abroad,taking the quartz pendulous reed as example,several common technologies for machining quartz device at present are described in detail in this paper.On the basis of these, the paper also presents the new development of machining technology of quartz device up to date.

  • 【文献出处】 中国机械工程 ,China Mechanical Engineering(中国机械工程) , 编辑部邮箱 ,2000年06期
  • 【分类号】TG50
  • 【被引频次】23
  • 【下载频次】349
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