【摘要】 介绍了在激光直写系统中用于光功率控制的声光调制器，并根据光强稳定度要求分析给出了调 制器的结构参数和相关的控制电路。按控制原理及调制器参数设计实现的声光调制系统获得了好的光 强控制效果．受控前Ｈｅ－Ｃｄ激光器输出光强稳定度为１５％，控制后一级衍射光光强稳定度达０．０２％．更多还原

【Abstract】 lt is important to control the laser power for laser manufacture technique. Here we described the application of acousto-optic modulator to control the laser power in Laser Direct Writting System (LDWS) and analyzed the structure. parameters and corresponding control circuits for the modulator used in the system. The acousto-optic modulation system which was designed according to the control theory and the modulator parameters produced good results in smoothing the output power. The ratio of the He-Cd laser output noise to total output power was 15% before controlling. The first order diffraction light power was stablized to the degree of 0. 02% by the acoustooptic device.更多还原