【摘要】 设计加工了一套纵向型双电离室ΔE E(气体 固体 )探测器系统 ,由于采用了双电离室及电场均匀技术 ,得到较好的能量分辨率 :利用 5 0 3MeV的12 C在束测量 ,ΔE分辨率达 3 3% ,Er 分辨率达 1 5 %。利用该系统对新型半导体材料GaAs、新型光电材料GaN等进行ERD分析 ,得到了材料的元素深度分布谱 (分辨达 5 0nm) ;在该系统和Q3D磁谱仪配合测量中 ,得到深度分辨达1nm的深度分布谱更多还原

【Abstract】 A ΔE(gas) E(solid) telescope with longitudinal double room ionization chamber is made. By double room technology, a higher energy resolution is achieved. Energy resolutions of 3.3 % for the ΔE detector and 1.5 % for E r detector are obtained by the in beam test with the elastic scattered 12 C from 197 Au at the energy of 50.3 MeV. Using it in ERD (elastic recoil detection )analysis, we analyzed some samples such as semi conductor GaAs,new photoelectric material GaN et al., and get depth spectra. This device can also be used as a monitor in ERD analysis with Q3D magnetic spectrometer to achieve higher resolution about 1 nm.更多还原