【摘要】 基于扫描探针理论 ,本文介绍了一种超精密加工用金刚石刀具刃口锋锐轮廓的测量方法 ,给出了测量图象并分析了测量结果 ,首次对金刚石刀具刃口轮廓参数进行了 AFM扫描原理下的初步评定。这一方法可提高金刚石刀具刃口锋锐度的测量准确度 ,对进一步分析刃口参数如何影响超精密加工表面质量具有指导意义更多还原

【Abstract】 On the basis of the scanning probe theory, a new measuring method for cutting edges of diamond tools used in the ultraprecision machining is presented. The error of measuring image and the analysis is given. Parameters of cutting edges are assessed. By above method, the measuring accuracy for cutting edges of diamond tools is improved. The method has a directive significance to analysis cutting edges parameters which influence on the surface performance.更多还原