【摘要】 用聚偏氟乙烯－三氯乙烯［Ｐ（ ＶＤＦ－ＴｒＦＥ）］薄膜作 １６ Ｘ１集成热释电线性阵列的敏感膜，经退火和７５ ｋＶ／ｍｍ场强极化后测得其相对介电常数为 １２. ６，介电损耗约 ０． ０１。为了降低热导和热容，提高探测器的探测灵敏度，用ＫＯＨ作化学腐蚀完全去除了线性阵列下方的硅衬底，形成悬空结构。用锁相放大器测定了该集成热释电线性阵列的电压灵敏度、电流灵敏度和噪声。实测得到最大电压灵敏度为１０７ Ｖ／Ｗ，最大探测率约５×１０~6ｃｍＨｚ~1/2／Ｗ。更多还原

【Abstract】 P(VDF-TrFE)copolymer film was used for sensing film of 16 X 1 integrated pyroelectric linear array. The film electric constant and dielectric loss are 12. 6 and 0.01,respectively after poling applied 70 kV/mm electric field. In order to reduce the thermal conductivity and heating capacity and increase the detectivity of array, the suspended structure was formed on silicon wafer by chemical etching of KOH. The voltage response,current response and noise of the pyroelectric integrated linear array were measured. The maximum voltage sensitivity and special detectivity are 107 V/W,and 5 X 106 cmHz1/2/W,respectively.更多还原