【摘要】 多晶硅表面微机械技术是微机电系统 (MicroeletromechanicalSystems,MEMS)中重要的加工技术。本文采用这种加工技术 ,提出了一种基于Sagnac效应的新型微机械光学角速率传感器 (OpticalRotationSensor ,ORS)。由于采用MEMS的最新技术 ,它将是一种低成本、微型化的ORS .文中给出了ORS中环形谐振腔的设计和基本理论分析 ,并提出了电路和控制系统的设计。同时完成了ORS关键光学器件———可移动微反射镜的设计和研制工作。更多还原

【Abstract】 Polysilicon surface micromachining technique is a very important fabrication method for Microeletromechanical Systems (MEMS).This paper presents a new Sagnac micromachined optical rotation sensor (ORS) using polysilicon surface micromachining process. Due to the MEMS technique,it will be a low-cost and miniaturized ORS. In this paper,the ring resonator of the ORS is designed and theoretically analyzed,and the design of the circuits and control system are also given. At the same time,the key optical element of the ORS - a movable micro-mirror is designed and developed.更多还原