【摘要】 L M- 6D激光干涉测量系统是于 1998年推出的新型激光干涉仪 ,一次安装调整能同时测出位置 (长度 ) ,X及 Y方向直线度、俯仰角、偏摆角和滚动等六个参数值。不仅保持了激光干涉测量精度高的特点 ,同时实现了多参数同步测量 ,减少测量时间 80 % ,大大提高了测量效率。更多还原

【Abstract】 LM\|6D Laser Interferometric System is a novel laser interferometer developed in 1986.It can measure the six parameters,such as position (length).X\| and Y\|axis straightness,angle of pitch,deflection angle,roll,etc. at the same time.It has the features of high pecision,multi\|parameter measurement and high speed and high efficiency.更多还原