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声表面波SO2气体传感器敏感膜的研究
Thin Film of Surface Acoustic Wave Sensor for Sulfur Dioxide Gas
【摘要】 为了深入研究声表面波 (SAW )SO2 气敏传感器频移与浓度之间的关系 ,对聚苯胺敏感膜的SAWSO2 传感器进行了试验与理论研究 ,并用双能谷模型推导了有关公式 .解释了频移与浓度关系曲线中的拐点问题 ,为聚苯胺敏感膜的SAW传感器应用提供了理论和实践依据 .将有机物聚苯胺 (PAn)和硫化镉 (CdS)两者的气敏特性进行了对比 ,得出了SO2 气敏膜具有双峰吸收的特点 ,并从理论上进行了论证 ,这对研究其他气敏膜也有指导意义 .
【Abstract】 PAn(polyaniline) thin film of surface acoustic wave (SAW) gas sensors was studied experimently and theoretically to explain the relations between frequency shift and sulfur dioxide concentration.Several formulas were derived using the double energy valley model to explain the critical dot of curve of frequency shift vs. sulfur dioxide gas concentration.Theory and experiment were provided to support the application of polyaniline thin film of SAW sensors. A polyaniline thin film was compared with a CdS thin film. The required characteristics of thin films for sulfur dioxide gas were obtained.
- 【文献出处】 西安交通大学学报 ,JOURNAL OF XI’AN JIAOTONG UNIVERSITY , 编辑部邮箱 ,2000年09期
- 【分类号】TP212
- 【被引频次】25
- 【下载频次】260