【摘要】 对用水热腐蚀技术制备的、具有蓝光发射的多孔硅样品在快速热氧化 (RTO)处理前后其光致发光谱、硅纳米颗粒的大小及尺寸分布变化进行了研究 .实验发现 ,新鲜多孔硅样品经过RTO处理后 ,其光致发光谱整体蓝移并由单发光峰分裂为两个发光峰 ;与此对应 ,样品中的硅纳米颗粒在整体减小的同时出现尺寸分离现象 .这一结果表明 ,多孔硅中的短波长发射也具有强烈的尺寸相关性更多还原

【Abstract】 Blue\|emitting porous silicon(PS) prepared by hydrothermal etching was treated by rapid thermal oxidation (RTO) process.Accompanying with the blue shift of the whole photoluminescence(PL) spectrum, the previous single PL peak split into two separate PL peaks. Simultaneously, the size\|reduction and size\|separation of the silicon nanocrystallites were observed. This result indicates that the short\|wavelength emissions in PS are also strongly size\|dependent.更多还原