【摘要】 利用改进的solgel工艺,通过快速热退火和慢速退火两种方式在Si衬底上制备了PbTiO3多晶薄膜,并采用红外反射光谱对PbTiO3薄膜进行了研究,观察到了薄膜中所有红外活性的8个声子模,发现两种退火方式得到的薄膜的光谱存在差异:前者的声子模频率除了三个变化不明显外,其余都低于后者.认为影响声子模行为的主导因素是薄膜中存在的应力,其中软模对应力的影响最为敏感更多还原

【Abstract】 Polycrystalline PbTiO 3 thin films have been prepared by rapid thermal annealing (RTA) and slow rate annealing (SRA) methods based on a modified sol gel process.Infrared (IR) reflectance spectra have been carried out to study the PbTiO 3 thin films.All eight IR active phonon modes have been observed in the films.Differences in frequencies of the corresponding phonon modes in sample prepared from RTA and SRA methods are also obtained:the frequencies of most phonon modes in the former case are lower than that in the latter.Stress in the thin films is considered to be the dominant factor to affect the actions of phonon modes,especially the soft modes.更多还原