【摘要】 碳离子的能量是影响非晶金刚石薄膜结构和性质最关键的工艺参数．采用磁过滤真空溅射离子技术，研究不同衬底偏压Ｖｂ（即不同碳离子能量）下制备的非晶金刚石薄膜的拉曼光谱和表面形貌．结果表明：－５０Ｖ≤Ｖｂ≤－１０Ｖ时，样品表面均匀、光滑，拉曼谱是对称且很宽的散射带;Ｖｂ＞－１０Ｖ或Ｖｂ＜－５０Ｖ时，已有晶团出现，表面粗糙度明显增加，拉曼谱明显地分裂为１５８０ｃｍ－１的Ｇ带和１３５０ｃｍ－１的Ｄ带．更多还原

【Abstract】 The ion energy is a crucial parameter for amnorphous diamond films deposition. Amorphous diamond films (a-D) were prepared by magnetic field filtered plasma stream system. TheRaman spectroscopy and surface morphology of a-D films deposited at various substrate bias volt-ages V_b were studied. The results show that a-D films, deposited at V_b in the range from -10Vto -50V, have a single and nearly symmetric very broad Raman peak range from 1200cm~-1 to1800cm~-1. The surface morphology of these films is very smooth and uniform. However, for samples deposited at V_b >-10V or V_b < -50V, the Raman spectra exhibit two broad peaks centeredapproximately at 1350cm~-1(D peak) and 1580cm~-1(G peak), and the surface roughness will beIncreases.更多还原