【摘要】 研究了冷等离子体提纯硅粉薄层时硅粉的粒度与硅粉薄层的厚度对提纯效果的影响。实验表明 ,硅粉的颗粒大小在 60— 80μm之间 ,硅薄层的厚度为 0 .5mm时提纯效果较好。更多还原

【Abstract】 Cold plasma was developed to purify Si powder layer.The influence of the particle size of Si powder and thickness of Si powder layer on the purity of Si particle was studied.The experiment shows that the optimum particle size of Si is 60～80μm and the optimum thickness of Si powder layer is 0.5mm.更多还原