【摘要】 介绍用热蒸发结合光刻技术以及离子束刻蚀或热磷酸腐蚀的方法 ,制备用于测量X光成像系统像传递函数的Al静态成像靶的工艺 .对两种腐蚀工艺进行了比较 ,确定离子束刻蚀是获得所需图形的理想方法 .经扫描电镜 (SEM)和台阶仪测量 ,Al静态成像靶的参数满足实验要求 .更多还原

【Abstract】 Preparation of aluminum grating target used in XUV radiograph system by means of evaporation, light-chisel and ion beam etching, or phosph-acid crrosiveness is introduced. Comparison of these two techniques, ion beam etching, and phosph-acid crrosiveness, shows that ion beam etching is the correct way to get the Aluminum Grating Target. And the conclusion is supported by measure of Scan Electron microscope and α-step apparatus.更多还原