【摘要】 介绍了一种用于纳米磨削的新型微位移系统 ,该系统由压电陶瓷微位移工作台和计算机控制的专用驱动电源组成 ,系统精度与压电陶瓷致动器和控制系统密切相关 .阐述了以压电陶瓷致动器为核心的微位移工作台和驱动电源的设计原理和设计特点 ,并用已研制成的高精度高分辨率微位移系统实现了陶瓷样件的纳米镜面磨制更多还原

【Abstract】 This paper introduces a nanometer grade micro displacement system suitable for ultraprecision grinding.It consists of a table driven by a piezoelectric ceramic actuator and a special driving power controlled by a computer.The systematic accuracy bears a relation to the actuator and driving power.The paper describes the design principle,the characteristics of the piezoelectric ceramic actuator and driving power,and then realizes nanometer mirror grinding of engineering ceramic samples using the high precision micro displacement system developed.更多还原