【摘要】 本文对FeSiAl合金薄膜磁性材料进行了研究。我们采用了直流溅射的方法制取了FeSiAl合金薄膜,并且研究了各种溅射条件如输入功率,靶材与基板的间距等与成膜速率的关系。讨论了退火前后薄膜的晶体结构,电磁性能。更多还原

【Abstract】 The magnetic sendust thin films have been investigated in this paper. FeSiAl films were deposited by DC sputtered method. Then, the sputtering conditions such as input power and the gap between the target and substrate that in fluence on the velocity of sputtering films were studied. Crystallographic and magnetic properties of sendust sputtered films before /after annealing were discussed.更多还原