【摘要】 对双端石英音叉横向弯曲振动的原理、力频特性、激励方式、电极的设置、制备方法及实验结果进行了深入的分析与讨论 .用光刻、化学腐蚀、离子溅射和激光调频等技术在一个石英片上可同时设计和生产出几十个甚至上百个超小型的双端石英音叉 .该音叉作为力敏传感器 ,在压电数字线性加速度计和精密数字天平中有着广泛的应用更多还原

【Abstract】 The doublended quartz tuning fork force sensor,which is manufactured by photoetching,chemical corrosion,ion beam sputtering and laser frequency regulation etc technique in the ultra clean room,is analysesd and discussed thoroughly for the principle of lateral flexure vibration,force frequancy property,encourage way and electrode configuration,preparation method and test result.更多还原