【摘要】 用粉末溅射方法制备了体掺杂型SnO2 :Pt薄膜和表面层掺杂SnO2 /SnO2 :Pt双层膜 .实验结果表明 ,由室温至 2 0 0℃ ,这两种薄膜对CO气体均显示了较高的灵敏度和选择性 .单层膜厚度和双层膜导电层及气敏层厚度对灵敏度有明显的影响 .通过对掺杂单层膜和双层膜气敏特性的比较 ,对粉末溅射SnO2薄膜的气敏响应机理进行了探讨 .更多还原

【Abstract】 Two kinds of bulk doped thin film,a SnO 2:Pt film an d a double layer SnO 2/SnO 2:Pt film were fabricate by powder sputtering meth od.The experimental results showed that both the films were of high sensitivity and good selectivity to CO gas from room temperature to 200 ℃.The gas sensitivi t y of the SnO 2:Pt film strongly depended on the film thickness.The gas sensitiv ity of the SnO 2/SnO 2:Pt double layer film was decided by the thickness of b oth the electric conductance layer and the gas sensing layer.By comparing the ga s sensing characteristics of the two films,the gas sensing mechanism of the SnO 2 thin film was investigated.更多还原