【摘要】 应用光散射原理 ,采用半导体激光器做光源 ,光纤准直、光电二极管阵列接收信号 ,A/D模数转换 ,单片机计算结果的内表面粗糙度测量仪 ,可无接触测量复杂形状工件的内表面 ,测量速度快 ,分辨率高 ,仪器体积小 ,且测量精度高更多还原

【Abstract】 The inisde surface roughometer based on principle of light scattering is developed with laser diode,optical collimation fiber. Photodiode arrays receive light signals and change them to electrosignals. After electrosiganls are processed by A/D, the sing chip microcomputer can calculate the value of roughness. The instrument can non-contactly measure the inside surface with complicated form. It has high measuring speed,resolution and precision.更多还原