【摘要】 表述了ＤＦ激光波段采用ＣａＦ２和硅窗口减反射膜系的结果。分析了设计多层ＡＲ膜的方法并给出用ＺｎＳｅ／ＹｂＦ３和ＺｎＳ／ＹｂＦ３材料组合的双层和五层ＡＲ膜系。计算了各种膜系的理论性能。研究了膜层淀积工艺技术，对于ＣａＦ２和硅窗口，在ＤＦ激光波段实验透过率分别为９９．５４％和９９．８９％，镀ＡＲ膜ＣａＦ２窗口能承受４．３ｋＷ／ｃｍ２的连续波ＤＦ激光辐射。更多还原

【Abstract】 The results of antireflection thin film systems for single crystal CaF2 and silicon windows for application at DF laser wavelengths have been present in this paper. The method designing multilayer AR coatings structure has been analyzed, and single layer, double layer and five layer AR coatings have been given with materials ZnSe/YbF3 combination and ZnS/YbF3 combination. The theoretical performances evaluated for various coatings. The deposition process has been developed in this paper. The experimental results with transmittance more than 99. 54% and 99. 89% AR coated CaF2 and silicon windows obtained. The damage threshold is more than 4. 3kW/cm2 at continue wave DF laser wavelength region for AR coated CaF2 windows.更多还原