【摘要】 利用大面积光刻和腐蚀等工艺 ,研制成功了一块用于激光直接驱动约束聚变装置的 1 .0 6μm波段、口径为 2 50 mm的无规位相板。台阶几何深度实测值与理论值的相对偏差为 1 .2 4 % ,该位相板可获得边缘陡直、近似平顶的焦斑光强分布。表明该工艺可适用于大口径无规位相板的制作更多还原

【Abstract】 WT5”BZ]A large aperture random phase plate (RPP) for target plane laser beam smoothing at 1.06μm wavelength was fabricated using large aperture exposure and dilute HF etching processes. The RPP’s clear aperture is φ 250mm. The measured average step height is 1.060μm at 5 locations on the RPP, which has a relative deviation of 1 24% to the theoretical value. A focal spot with very sharp edges and nearly flat top overall envelop intensity distribution was obtained at the focal plane of a focusing lens. These results show the fabrication techniques for RPP is effective, and is easily scalable to even larger apertures. [WT5”HZ]更多还原