【摘要】 报道 COIL激光用变形反射镜的介质反射多层膜实验。在真空镀膜机内制备了膜系Sub/ Ag( Si O2 / Hf O2 ) 4/ air和 Sub/ Ag( Yb F3 / Zn S) 3 / air,反射率分别为 99.90 %和 99.87%。在经历 1 0 9次循环后变形镜物理特性无变化。研究了 COIL激光辐射下热畸变和损伤特性。分别在功率密度为 1 .52 k W/ cm2和 1 .1 8k W/ cm2的 COIL激光辐照下 ,这两种膜系的变形镜波前变化相应为 0 .3 7λ和 0 .54λ,因此对于变形镜 1 k W/ cm2 激光功率密度是安全可靠的。更多还原

【Abstract】 WT5”BZ]The experimental study of the dielectric coating for deformable mirrors in COIL laser system is reported. The coating Sub/Ag(SiO 2/HfO 2) 4/Air and Sub/Ag(YbF 3/ZnS) 3/air have been manufactured in high vacuum deposition chamber. The optical and physical properties of high reflectance dielectric coatings subjected to a large number of deformation cycles are determined. The reflectance of these mirrors is 99.90% and 99.87% respectively. The physical properties of the deformable mirrors have not been changed under deformable cycle 10 9 times. The thermal distortion and laser induced damage of deformable mirror irradiated with COIL laser are investigated. It is concluded that 1kW/cm 2 laser power density is safe and reliable for these deformable mirrors in COIL laser system. [WT5”HZ]更多还原