【摘要】 研究了不同的沉积电压对辅助加热式PCVD -TiN涂层的影响。实验证明 ,提高沉积电压可以细化TiN涂层的柱状晶结构 ,增加TiN涂层的显微硬度和沉积速率。在试验范围内 ,涂层内残存的氯含量基本不受沉积电压的影响更多还原

【Abstract】 The effect of deposition voltage on auxiliary heat PCVD-TiN coatings has been studied. The experiments indicated that the deposition rate and the hardness of the TiN coatings are direct proportion to the deposition voltage. The fracture of the TiN coatings is columnar structure and close in texture with the rise of the deposition voltage. There is no relationship between the deposition voltage and the chlorine content.更多还原