【摘要】 利用计算机计算薄膜在反射率极值法监控的镀膜系统上淀积时监控片反射率的实时变化并模拟薄膜的实际淀积过程 ,得出设计膜系在一定制备工艺条件下所获得成膜的膜系结构 ,根据模拟结果计算的光学特性曲线与实际淀积出的成膜实测值相吻合更多还原

【Abstract】 A program has been developed to calculate the real time variation of the reflectivity on the monitoring chips and to simulate the deposition process of a coating with quarterwave optical thickness layers taking the reflectance turning point monitoring approach. The optical thickness of each layer of the deposited coating can be got by the computer programmer. The computer simulation accords with the experiment results.更多还原