【摘要】 采用射频磁控溅射法制备了用于非致冷红外焦平面阵列的BST((Ba0 .7Sr0 .3)TiO3)铁电薄膜热敏电容器 .介绍了热敏电容器上下电极的选材和制备及铁电薄膜的制备工艺 .根据热敏电容器的电容 -温度曲线 ,分析了热敏电容器的工作原理 .实验结果表明BST铁电薄膜热敏电容器可以工作在室温附近 ,约 2 6℃处更多还原

【Abstract】 The thermal sensitive BST ferroelectric thin film capacitors for uncooled infrared focal plane array prepared by Radio frequency Magnetron sputtering have been investigated by focusing on the condition of fabrication of electrode and BST thin film. The capacitor temperature properties of the thermal sensitive BST ferroelectric thin film capacitors have been measured by an impedance analyzer. According to the capacitor temperature curve and the theory of thermal sensitive capacitors, it is possible that the thermal sensitive BST ferroelectric thin film capacitors can work at the room temperature (about 26?℃).更多还原