【摘要】 研究了ＴｉＮｉ形状记忆合金薄膜的表面形貌及其影响因素．试验结果证明：该薄膜的 形成过程遵循形核、长大、迷津结构和连续膜４个阶段．镀膜时氩分压、基板温度、基板类型、基 板的表面粗糙度以及膜的成分、镀后热处理等都对薄膜的形貌有重大的影响．更多还原

【Abstract】 The morphology of TiNi SMA thin film and its influencing factors are researched. It shows that the form of TiNi SMA thin film follows four-period process:forming nucleus, growing up, forming astray-structure and continuous film. There are many factors influencing the morphology of TiNi SMA thin film, which are Argon pressure, substrate temperature, substrate type and roughness of its surface under the regular arc discharge, and composition of the film as well as heat treatment after deposit of the film.更多还原