【摘要】 本文研究菲涅耳谐衍射透镜的特性和工作条件 ,分析二元谐衍射透镜的衍射效率及制作要求 ,设计并研制了用于萨克 -哈特曼波前传感器的双波长共焦谐衍射微透镜列阵 ,得到了良好的应用效果 .更多还原

【Abstract】 The spectral properties and the configuration parameters of multiorder diffractive lens have been studied in the paper.For fabricating the lens and lens array with binary profile,a design method was discussed to determine the phase depth factor and other parameters according to the requirement of chromatic tolerance,the diffractive efficiency as well as and fabricating limitation.As an application,a ring type microlens array was designed and fabricated for working at two wavelengths in the system of Shack Hartmann sensor,satisfied result was obtained at two selected wavelengths.更多还原