【摘要】 采用双靶反应溅射制得 Sn O2 ∶ Zr薄膜 ,并对它作了 1 5 0°C下 SO2 气敏光学特性试验 ,首次发现在适当工艺条件下制得的 Sn O2 ∶Zr薄膜在近红外波段 (1 .7～ 3 μm)对 SO2 气体具有明显的光学气敏特性 ,在 2 .65 μm附近透过率上升幅度达 1 0 %左右 .Zr的引入增强了 Sn O2 薄膜对 SO2 的吸附能力 .用二次离子质谱对吸附 SO2 前后的薄膜作了组分相对含量分析 .本实验结果对今后研究高性能 SO2 气敏传感器有一定的价值 .更多还原

【Abstract】 The Zr doped SnO 2 (namely SnO 2∶Zr) thin film was prepared in the atmosphere of O 2 and Ar by reactive sputter method.The metal Zr target was controlled by rf sputter system and Sn target by dc sputter system.Gas sensitive test for SO 2 at 150°C on SnO 2∶Zr thin film was carried out.The SnO 2∶Zr thin film had good optical gas sensitivity to gas SO 2 especially at band 1700nm to 3000nm.The transmission of the tested film increased by 10% at 2650nm compared with original sample film.The additive Zr brought the good adsorption ability of SO 2 on the film.SIMS was used to analyze the composition change of the film before and after the adsorption of gas SO 2.The discovery of the results has some instruction for further research of high sensitive and good selective SO 2 gas sensor.更多还原