【摘要】 新型热像仪是一种基于微机械技术的光调制热成像系统 ,它采用光调制原理来实现像转换和像增强 ,其核心是一个采用与互补型金属氧化物半导体工艺相容的微机械技术制作的光调制热成像器件。该系统具有一系列潜在的优点 :灵敏度和分辨率高、体积和能耗小、响应时间短并可在室温下工作。叙述了器件的设计和建模 ,通过一种简化的悬臂梁理论计算了其灵敏度、最小可探测能量及响应时间等参数 ,并对双材料梁的设计进行了优化。采用 ANSYS 5.4程序对设计的器件进行了有限元模拟 ,得到的灵敏度和响应时间分别为 0 .0 3m/ W和 6ms。更多还原

【Abstract】 A novel kind of light modulating thermal image system (LMTIS) based on micromachining technology is described. This system incorporates the function of thermal image conversion and image intensification together on the base of a light modulating thermal image device, a monolithically fabricated chip using CMOS compatible surface micromachining techniques. This system has a series of potential advantages: high sensitivity and definition, low volume and power expenditure as well as short response time and room temperature operating ability. The design and modeling of the device are presented. Theoretical calculations on the sensitivity, minimum detectable power, and response time are carried out by using a simplified cautilever beam theory, and the design is optimized for the sake of high sensitivity and low minimum detectable power. Finite element method (FEM) simulation using ANSYS 5.4 program demonstrates the theoretical calculations preliminarily, as a result, sensitivity of 0.03 m/W and response time of 6 ms are obtained.更多还原