【摘要】 基于共焦扫描差分术 ,提出了检测不同表面反射率的物体表面形貌的方法 ,并提出了在光纤共焦扫描成像术中利用边缘判据进行边缘定位的极限尺度。上述思想用于检测光盘盘基预刻槽形结构 ,在建立的一套光纤共焦扫描成像装置上进行了光盘盘基预刻槽结构的检测 ,获得了槽宽、槽间距及槽深等实验数据 ,与槽标准参数相符更多还原

【Abstract】 A new surface measurement method for an object with different reflection is demonstrated based on differential confocal microscopy. The limit ranges of edge positioning is proposed while using edge criteria in fiber confocal scanning microscopy. As application, the optical disk pre groove is measured by using fiber optical confocal scanning imaging system. The gray image and cross section profile with groove width, depth and pitch are given. The experimental results are in good agreement with the reference data.更多还原