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SiO2光学增透膜的制备及光学性能
Preparation and optical properties of SiO2 AR coating
【摘要】 在碱催化体系中以正硅酸乙酯 (TEOS)为前驱体制得SiO2 溶胶 ,采用旋转镀膜法 (spin coating)制备SiO2 光学增透膜。研究了在不同制备条件下对膜层光学性质的影响 ,推算了膜层的折射率及厚度 ,并由此给出膜层孔隙率以及膜层的厚度与转速的关系
【Abstract】 SiO 2 AR coating were made by spin coating, using TEOS as precursor, Sols were obtained in NH 3·H 2O catalysis. The properties of coating have been studied based on the transmittance spectra, the relationships with refractive index and thickness of the coating are deduced and the porosity of coatings was given.
【基金】 国家“8 63”416资助项目
- 【文献出处】 光学技术 ,OPTICAL TECHNOLOGY , 编辑部邮箱 ,2000年02期
- 【分类号】O484.41
- 【被引频次】32
- 【下载频次】603