【摘要】 精密调焦伺服控制技术属于激光直写设备中的关键技术之一。简要介绍了二元光学激光直写设备的工作原理 ,分析了调焦伺服实现的方法 ,重点分析了由电机与压电陶瓷构成的大范围二级调焦伺服系统的工作原理。提出了采用两点探焦法解决刻划时焦点的跳动问题 ,采用归一化处理消除光强波动对调焦精度的影响。最后 ,给出经过这些方法改进后的调焦特性曲线更多还原

【Abstract】 The working principle of binary optics laser direct writting device is introduced. Method of high resolution focussing servo is discussed. The principle of two steps focussing servo system ,which consists of motor and piezoelectric ceramic,is analysed. The method of two point probe focus is proposed to resolve the problem of the jog of focus, and unitization processing is used to eliminate the change of laser power. At last,the curve of the focussing result is given.更多还原