【摘要】 测量了用离子注入方法将La、O+双注入硅基样品在室温下的光致发光 (PL)谱 ,实验结果表明它们均具有蓝、紫发光峰 ,且发光稳定。在一定范围内发光效率随退火温度和注入顺序的不同而变化。用原子力显微镜观察了不同条件下制备的样品的表面形貌 ,并对样品的发光机理作了初步探讨。更多还原

【Abstract】 The photoluminescence (PL) spectra at room temperature for the silicon based samples doped by La、O + by ion implantation are measured. The results show that all the samples possess blue violet photoluminescence properties under the ultraviolet light excitation and its light emission is stable. The intensity of PL spectra is closely relative to La and O + implantation and to the temperature of thermal annealing. Besides, the feature and appearance of the Samples was surveyed with atomic force microscopy (AFM). The photoluminescence mechanism for our samples is also discussed.更多还原