【摘要】 本文对热驱动微型泵在空载和有负载 (即泵送液体 )情况下的性能进行了实验研究。空载情况下 ,在所测频率范围内 ,膜片的振幅随频率减小 ,但泵腔的体积变化率随频率基本不变 ;随着加热功率的增加 ,膜片平衡位置逐渐远离其静止位置 ,当功率足够大时,膜片平衡位置的变化将减缓 ,振幅变化也将减缓。实验测定了有负载情况下泵的频率特性,对应于最大流量的频率为3Hz ;实测了流量随加热功率的变化 ,当功率较小时 ,流量缓慢变化 ,当功率较大时 ,流量迅速增大。更多还原

【Abstract】 Performances of thermal actuated micropump with or without liquid in the chamber were measured. When there is not liquid in the chamber, the amplitude of oscillation reduces with frequency, but the change of the chamber volume in per minute is constant; the equilibrium position of the membrane departs from the static position when input power increases. When the input power is high enough, the change of the equilibrium position will slow down; and the change of the amplitude of oscillation will slow down too. When there is liquid in the chamber, it is found that the micropump has maximum flow rate(33.6μL·min-1) at 3Hz. When the input power is low, the flow rate increases slowly with input power. When the input power is high enough, the flow rate increases rapidly with input power.更多还原