【摘要】 用划痕法测试了不同成分的Ti -Al-N系功能梯度薄膜及其均质薄膜的膜基结合力。结果表明 ,Ti-Al-N系功能梯度薄膜的膜基结合力高于均质膜 ,且随着氮分压变化间隔的增加 ,结合力逐渐增大。基于膜基匹配及残余应力与结合力的关系 ,合理地解释了成分梯度对Ti -Al-N系功能梯度薄膜结合力的影响。更多还原

【Abstract】 Automatic scratch tester was used to measure the bonding strength between substrate and coatings of Ti-Al-N functionally gradient and uniform coatings.The micrographs of scratches were investigated by OM and SEM.The bonding strength between substrate and coatings of Ti-Al-N FGC is better than that of uniform coatings.The effect of composition gradient on bonding strength was explained by the relation of match between substrate and coatings,residentical stress and bonding strength.更多还原