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Sol-Gel法制备SnO₂纳米晶薄膜

Preparation of Nanocrystalline SnO₂ thin Film by Sol-Gel Method

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【Author】 XIANG Siqing,SUO Hui,RUAN Shengping,ZHU Yumei,LUI Bingbing,QUAN Baofu,XU Baokun (Department of Electronic Engineering,Jiling University,Changchun,130023,China)

【机构】吉林大学电子工程系!吉林长春130023；

【摘要】以Sn(OH) 4 水合胶体为原料 ,采用简单的旋转涂覆与烧结工艺在Si片上成功制备出了表面形貌平整、光亮的SnO2 纳米晶薄膜 ,为该种材料制作实用的气敏元件打下了很好的基础。更多还原

【Abstract】 Nanocrystalline SnO 2 thin films were successfully prepared on Si substrate by sol-gel technique based on Sn(OH) 4 colloid.AFM plots show that their morphologies are flat and bright.The work make it possible to prepare practical gas sensor made of this material.更多还原