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La_0.7Sr_0.3FeO₃纳米晶薄膜的制备及FET式气敏元件的研制

Study on the Preparation of La_0.7Sr_0.3FeO₃ Nanocrystalline Film and the Fabrication of FET Gas Sensor

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【Author】 SUO Hui 1,2 ,ZHAO Yi 1,RUAN Shengping 1,ZHANG Tong 1,LIU Bingbing 2,XU Baokun 1,WANG Lijun 3 (1.State Key Laboratory on Integrated Optoelectronics,Jiling University Region,Department of Electronic Engineering; 2.State Key Laboratory on Superha

【机构】吉林大学电子工程系!集成光电子国家重点实验室吉林大学分区超硬材料国家重点实验室；吉林长春130023；吉林大学电子工程系!集成光电子国家重点实验室吉林大学分区；吉林大学电子工程系!集成光电子国家重点实验室吉林大?；

【摘要】采用溶胶凝胶工艺 ,合成出纳米晶La0 .7Sr0 .3FeO3薄膜 ,薄膜为钙钛矿结构 ,平均粒径在 4 0nm左右。利用该薄膜采用平面工艺制作出微米尺寸、室温工作的La0 .7Sr0 .3FeO3纳米薄膜栅OSFET式气敏元件 ,并对其气敏性能进行了测试 ,发现器件的漏电流在乙醇气体中增大 ,在氮氧化物中降低。更多还原

【Abstract】 The nanocrystalline film of La 0.7 Sr 0.3 FeO 3 was synthesized with sol-gel technique,whose grain size was found around 40 nano-meter.Basing on conventional planar technology of semiconductor,we fabricated out the nanocrystalline-film-gate OSFET gas sensor with it.After measurement,it was found that the leaking current of the new device would increase when the concentration of ethanol gas enhanced and would decrease in nitrogen oxide gases,it could operate well at room temperature.更多还原