【摘要】 研究了气体流量比 (O2 /C2 H2 )对燃焰法沉积金刚石厚膜的影响 ,并以约 5 0 μm /h的较高速率沉积出了均匀、致密呈淡黄色透明状的高质量金刚石厚膜更多还原

【Abstract】 The influences of gas flow ratio,O 2/C 2H 2,on the depositing diamond thick film by the combustion flame method have been investigated,the uniform and compact and high quality diamond thick film which is light yellow and transparent has been deposited at a fairly high rate,50μm/h.更多还原