【摘要】 描述了利用射频等离子体溅射法 ,采用不同阴极在衬底Si片上形成类金刚石薄膜的杂质含量及杂质对厚度和硬度的影响分析与结果 ;比较了DLC膜的力学性能在有无金属杂质情况下的异同 ,分析和计算了其厚度与硬度与制备参数间的关系 ,得出利用石墨作电极能制备出质量较好的DLC膜 ,初步探讨了在Si衬底上沉积高硬度和强附着度类金刚石薄膜的有关工艺条件 ,并在理论上对这一结果进行了解释更多还原

【Abstract】 In this paper,we described DLC films were deposited on the Si substrate by radio frequency plasma chemical vapor deposition (RF-PCVD).The mechanical properties such as hardness and thickness of DLC films contained Fe impurity were tested,The results about the mechanical properties of the DLC films deposited by two different cathode-targets were compared in detail.It was concluded that besides the deposited time,the content of Fe impurity affected the mechanical properties of DLC films obviously.Thereby, a new efficient method of DLC films deposited with C cathode-target was suggested which could produce high quality DLC films.Also,we discussed the relationship between DLC films in high quality and its experimental parameters during the deposited process.The results were explained on the theory.更多还原