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衍射微透镜列阵掩模制作软件的设计
Design of Mask Manufacturing Software for Diffractive Microlens Arrays
【摘要】 研究了衍射微透镜列阵的设计方法及 CIF格式掩模数据的数据结构与生成方法 ,设计了一套实用软件 ,采用图形切割、跟踪计算等方法 ,解决了生成子孔径为矩形、六方形及圆环扇形的衍射微透镜列阵掩模的问题 ,满足了实际系统对衍射微透镜列阵子孔径形状的各种需求。
【Abstract】 The design method for diffractive microlens arrays,the data struc t ure of CIF format mask data and their generating method are investigated in the paper.A practical software is designed.The problems in generating the masks for d iffractive microlens arrays with sub-aperture shapes of rectangular,hexagon,cir que-sector are solved by adopting the methods of image segmentation and trackin g algorithm,thus the various requirements of the practical systems for the sub- apertures of the diffractive microlens arrays are fulfilled.
【关键词】 衍射微透镜列阵;
掩模数据文件;
掩模;
图形切割;
【Key words】 Diffractive microlens arrays; Software design; Mask data file; Pattern segmentation;
【Key words】 Diffractive microlens arrays; Software design; Mask data file; Pattern segmentation;
- 【文献出处】 光电工程 ,OPTO-ELECTRONIC ENGINEERING , 编辑部邮箱 ,2000年05期
- 【分类号】TP319
- 【被引频次】1
- 【下载频次】108