【摘要】 简要讨论了计算机控制应力盘抛光大口径高陡度非球面的基本原理 ,用 Zernike多项式拟合的数学方法研究应力盘工作过程中的面形动态变化 ,对这一方法所能达到的精度进行了分析 ,给出了计算结果。更多还原

【Abstract】 The basic principle for polishing a large aperture and highly aspherical optical surface with a computer controlled stressed lap is simply discussed.The dynamic change of the surface shape during the operating process of the stressed lap is investigated with a mathematical method of Zernike polynomial fitting,the accuracy of the method is analyzed and the computation results are given.更多还原