【摘要】 在已有的以无机锆盐为原料 ,用 Sol- Gel方法制备硅基 Pb(Zr0 .5 3 Ti0 .47) O3 (PZT)铁电薄膜的工艺基础上 ,成功地制备出 Pb Ti O3 / Pb(Zr0 .5 3 Ti0 .47O3 / Pb Ti O3 (PT/ PZT/ PT)夹心式新结构。由于采用了这种夹心式结构 ,使得 PZT铁电薄膜的退火温度由原来的 90 0℃降到了 70 0℃。通过实验检验了新结构的铁电和介电性能。发现夹心结构有助于提高 PZT薄膜的品质。更多还原

【Abstract】 A new PbTiO\-3/Pb(Zr\-\{0.53\}Ti\-\{0.47\})O\-3/PbTiO\-3(PT/PZT/PT) sandwich structure is proposed based on Sol Gel method using inorganic zirconium salt as raw material. The annealing temperature is reduced from 900℃ to 700℃. Dielectric and ferroelectric properties are studied, and the new structure is proved to be helpful to the quality of PZT thin films.更多还原