【摘要】 介绍了厚膜集成微压传感器的研制过程。此种集成微压传感器的量程为１ ｋＰａ、满量程输出为２５ ｍＶ、非线性小于０ ．２ ％ 、综合精度小于０ ．５ ％ 。更多还原

【Abstract】 Introduce the research of the integrated micro-pressure thick-film sensor.The measurement range of the sensor is 1 kPa.The full-scale range is 25 mV.The nonlinearity is less than 0.2 %.The precision is less than 0.5 %.更多还原