【摘要】 本文利用CF4 气体 ,对YBCO薄膜表面进行可控的rf等离子体氟化处理 .AFM与XPS的分析结果表明 :适当的氟化所起的作用主要为化学反应作用 .氟化可造成Y( 3d)与O( 1s)诸元素的本征峰相对强度减少 ,甚至消失 ;对Ba( 3d) ,Ba( 4d)和其它元素也有影响 .本文的研究为利用等离子体氟化YBCO膜形成弱化势垒层提供了初步结果 .更多还原

【Abstract】 The effects of RF plasma fluorination on surface of the YBCO thin film were studied by means of X ray photoelectron spectra (XPS). The XPS results indicate that the binding energy peaks of O(1 s ),Y(3 d ) of YBCO samples have obvious changes. In this letter, the changes of morphology and room temperature resistance of YBCO thin film were also given under plasma fluorination.更多还原