【摘要】 介绍了一种制作折射型微透镜列阵的新方法，其主要思想参考了灰阶掩模法。所用掩模板用激光直写制作，通过一次曝光即可在光刻胶上形成折射型微透镜的轮廓，并给出了微透镜轮廓的测试图样。更多还原

【Abstract】 In this paper, a novel method for refractive microlens array fabrication is introduced. Its main idea is similar to that of gray-scale mask method. The mask needed is made through laser directwriting technique. Exposed only once, the profile of refractive microlens array is formed on the photoresist. The figures of the test are presented for the microlens array obtained.更多还原