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物理气相沉积TiN复合涂层研究进展
Research Development of the TiN PVD Composite Coatings
【摘要】 物理气相沉积 (PVD) Ti N涂层已获广泛应用。为克服单一 Ti N涂层的缺陷及进一步改善 Ti N涂层的性能 ,近年来致力于复合涂层的研究。本文综述了 Ti N+ Ti、Ti N+化学镀 Ni-P、Ti N+氮化等复合涂层的工艺、组织和性能之间的关系 ,并探讨了过渡层的作用。
【Abstract】 The physical vapor deposited TiN coating has been widely used in many inductrial fields.In order to eliminate the defects and to optmige properties of TiN coating,composite coatings of TiN and different interlayers have been investigated in recent years.The processes,structures and properties of the composite coatings which consist of TiN and Ti,electroless Ni\|P and nitriding interlayer, have been reviewed in this paper.In the mean time the effects of interlayer have been discussed.\;
- 【文献出处】 材料科学与工程 ,MATERIALS SCIENCE AND ENGINEERING , 编辑部邮箱 ,2000年02期
- 【分类号】TG174.4
- 【被引频次】85
- 【下载频次】646