节点文献
衬底负偏压增强金刚石成核机制的研究进展
Progress of Study on Mechanisms of Negative Substrate Bias Enhanced Diamond Nucleation
【摘要】 综述了近几年来对衬底负偏压增强金刚石成核机制的研究,并且对各种机制进行了分析和讨论,提出了今后有待研究的问题。
【Abstract】 In this paper,the studies on mechanisms of negative substrate bias enhanced diamond nucleation in recent years were reviewed. Various mechanisms were analyzed and discussed. Some problems to be addressed in fu ture research were outlined.
【关键词】 衬底负偏压；
成核机制；
金刚石膜；
【Key words】 negative substrate bias； mechanism of nucleation； diamond film；
【Key words】 negative substrate bias； mechanism of nucleation； diamond film；
【基金】 国家自然科学基金(No;19904016)
- 【文献出处】 材料导报 ,Materials Review , 编辑部邮箱 ,2000年04期
- 【分类号】TQ163
- 【被引频次】4
- 【下载频次】83